ME4780 Micro Electro Mechanical Systems (MEMS) Design II
Same as EC4280 and PH4280. This is the second course in Micro Electro Mechanical Systems (MEMS) Design. This course will expose students to advanced topics on material considerations for MEMS, microfabrication techniques, forces in the micro- and nano- domains, and circuits and systems issues. Case studies of MEMS based microsensors, microactuators and microfluidic devices will be discussed. The laboratory work includes computer aided design (CAD) and characterization of existing MEMS devices. The grades will be based on exams, lab projects, and a group design project.
Lecture Hours
2
Lab Hours
4