PH3280 Introduction to MEMS Design

This is the first course introducing students to Micro Electro Mechanical Systems Design (MEMS). Topics include material considerations for MEMS and microfabrication fundamentals; surface and bulk micromachining; forces and transduction; forces in micro- nano- domains and actuation techniques. The laboratory work includes performing exercises to become proficient in computer aided engineering (CAE) software for the design of MEMS devices. Grading will be based on homework from the textbook, midterm and final exams, and a design project.

Cross Listed Courses

EC3280 and ME3780

Prerequisite

PH1322, EC2200, MS2201

Lecture Hours

3

Lab Hours

3

Course Learning Outcomes

Upon successful completion of this course, students will:

• Understand key ideas and technologies in the field of Micro Electro Mechanical Systems (MEMS).
• Understand the material properties and microfabrication processes used to produce MEMS devices.
• Understand the mechanical concepts governing the operation of MEMS devices and systems.
• Understand thermal concepts governing the operation of MEMS devices and systems.
• Understand electrical concepts governing the operation of MEMS devices and systems.
• Understand basic MEMS device design (CAD structural design) using the Finite Element Analysis software Comsol Multiphysics, which can simulate most of the MEMS device behaviors.
• Understand basic MEMS process design (CAD process design) using MEMS Pro, which can model and analyze most of the MEMS microfabrication processes.
• Perform basic microfabrication processes in a cleanroom.