EC3280 Introduction to MEMS Design
This is a 4.5 credit hour class introducing the students to Micro Electro Mechanical Systems (MEMS). Topics include material considerations for MEMS and microfabrication fundamentals; surface and bulk micromachining; forces and transduction; forces in micro- nano- domains and actuation techniques. The laboratory work includes exercises to become proficient in computer aided engineering (CAE) software for the design of MEMS devices.
Cross Listed Courses
PH3280 and
ME3780
Lecture Hours
3
Lab Hours
3