EC3280 Introduction to MEMS Design

This is a 4.5 credit hour class introducing the students to Micro Electro Mechanical Systems (MEMS). Topics include material considerations for MEMS and microfabrication fundamentals; surface and bulk micromachining; forces and transduction; forces in micro- nano- domains and actuation techniques. The laboratory work includes exercises to become proficient in computer aided engineering (CAE) software for the design of MEMS devices.

Cross Listed Courses

PH3280 and ME3780

Prerequisite

EC2200 or MS2201 or PH1322 or consent of instructor.

Lecture Hours

3

Lab Hours

3

Course Learning Outcomes

·       The student should develop an understanding of design, modeling, fabrication, and characterization techniques for MEMS devices.

·       How to best apply this technology to military applications.