ME3780 Introduction to Micro Electro Mechanical Systems Design

This is a class introducing students to Micro Electro Mechanical Systems (MEMS). Topics include material considerations for MEMS and microfabrication fundamentals; surface, bulk and non-silicon micromachining; forces and transduction; forces in micro- nano- domains and actuation techniques. Case studies of MEMS based microsensor, microactuator and microfluidic devices will be discussed. The laboratory work includes computer aided design (CAD) of MEMS devices and group design projects.


EC2200 or MS2201 or PH1322 or consent of instructor.

Lecture Hours


Lab Hours


Quarter Offered

  • Fall
  • As Required