EC4280 Micro Electro Mechanical Systems (MEMS) Design II

Same as ME4780 and PH4280. This is the second course in Micro Electro Mechanical Systems (MEMS) Design. This course will expose students to advanced topics on material considerations for MEMS, microfabrication techniques, forces in the micro- and nano-domains, and circuits and systems issues. Case studies of MEMS-based microsensors, microactuators, and microfluidic devices will be discussed. The laboratory work includes computer aided design (CAD) and characterization of existing MEMS devices. The grades will be based on exams, lab projects, and a group design project.



Lecture Hours


Lab Hours


Quarter Offered

  • As Required